Scanning Electron Microscopy Lab

The scanning electron microscope in our lab is a JEOL-820 equipped with a Kevex system for energy dispersive spectroscopy (EDS). EDS is a technique that measures the energy of x-rays emitted by the electron beam. These emitted x-rays have characteristic energies that are associated with the elements. With the SEM/EDS system, we have the capibility for high resolution imaging using the SEM as well as the ability to determine the composition of the surfaces using the EDS system. It allows the selective examination of the composition of features as small as 100 nm. Both the EDS and SEM are interfaced to a Macintosh computer via a 4pi interface. This enables the digital acquisition of both SEM images and EDS spectra.

LMaSS SEM/EDS system

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April 27,1999